Dynamic measurement of thin liquid film parameters using high-speed ellipsometry

被引：2

作者：

Yupapin, PVP

Chitaree, R

Palmer, AW

Grattan, KTV ^{[1
]}

Weir, K

机构：

[1] King Mongkuts Inst Technol, Fac Sci, Dept Appl Phys, Optoelect Res Lab, Bangkok 10520, Thailand

[2] City Univ London, Sch Engn, Dept Elect Elect & Informat Engn, Opt Instrumentat Grp, London EC1V 0HB, England

[3] Univ London Imperial Coll Sci Technol & Med, Blackett Lab, Appl Opt Grp, London SW7 2BZ, England

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 65卷 / 01期

关键词：

dynamic measurements; high-speed ellipsometry; thin liquid films;

D O I：

10.1016/S0924-4247(97)01642-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The feasibility of the measurement of dynamic, thin liquid film properties using an ellipsometer-based fibre-optic modulation technique is presented. The essence of this technique is that a dynamic measurement of film parameters such as refractive index and Fresnel reflection coefficients may be simultaneously and automatically made, from which the instantaneous changes of liquid film thickness may be characterized. Such a scheme is discussed where a measurement rate of 25 Hz has been used to illustrate the value of the system in the monitoring of spreading liquid films. (C) 1998 Elsevier Science S.A.

引用

页码：19 / 22

页数：4

共 11 条

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