Effect of starting SOI material quality on low-frequency noise characteristics in partially depleted floating-body SOI MOSFETs

被引:10
作者
Ushiki, T
Ishino, H
Ohmi, T
机构
[1] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 9808579, Japan
[3] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi 9808579, Japan
基金
日本学术振兴会;
关键词
floating-body effect; generation/recombination events; low-frequency noise; SOI MOSFET;
D O I
10.1109/55.887482
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The low-frequency noise properties of partially-depleted (PD) floating-body silicon-on-insulator (SOI) MOSFETs fabricated on two types of commercially available bonded SOI (BSOI) wafers mere experimentally investigated. In the pre-kink region, a drain bias dependent Lorentzian-like noise has been observed for UNIBOND wafers, while a pure 1/f noise has been achieved for ELTRAN wafers, Our analysis shows that the charge-fluctuation induced by emission process through intermediate-level centers in the drain-depletion region causes the instability in the body voltage, resulting in the pre-kink excess noise for UNIBOND wafers.
引用
收藏
页码:610 / 612
页数:3
相关论文
共 10 条
[1]   SILICON-ON-INSULATOR MATERIAL TECHNOLOGY [J].
BRUEL, M .
ELECTRONICS LETTERS, 1995, 31 (14) :1201-1202
[2]  
CANADA M, 1999, ISSCC, P430
[3]   A SOI-RF-CMOS technology on high resistivity SIMOX substrates for microwave applications to 5 GHz [J].
Eggert, D ;
Huebler, P ;
Huerrich, A ;
Kueck, H ;
Budde, W ;
Vorwerk, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1997, 44 (11) :1981-1989
[4]   A general theory of phase noise in electrical oscillators [J].
Hajimiri, A ;
Lee, TH .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1998, 33 (02) :179-194
[5]   A 1/F NOISE TECHNIQUE TO EXTRACT THE OXIDE TRAP DENSITY NEAR THE CONDUCTION-BAND EDGE OF SILICON [J].
JAYARAMAN, R ;
SODINI, CG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (09) :1773-1782
[6]   Shot-noise-induced excess low-frequency noise in floating-body partially depleted SOI MOSFET's [J].
Jin, W ;
Chan, PCH ;
Fung, SKH ;
Ko, PK .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (06) :1180-1185
[7]   On the geometry dependence of the 1/f noise in CMOS compatible junction diodes [J].
Simoen, E ;
Claeys, CL .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (08) :1725-1732
[8]   AC floating body effects and the resultant analog circuit issues in submicron floating body and body-grounded SOI MOSFET's [J].
Tseng, YC ;
Huang, WM ;
Monk, DJ ;
Welch, P ;
Ford, JM ;
Woo, JCS .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (08) :1685-1692
[9]   Floating body induced pre-kink excess low-frequency noise in submicron SOICMOSFET technology [J].
Tseng, YC ;
Huang, WM ;
Ilderem, V ;
Woo, JCS .
IEEE ELECTRON DEVICE LETTERS, 1999, 20 (09) :484-486
[10]   EPITAXIAL LAYER TRANSFER BY BOND AND ETCH BACK OF POROUS SI [J].
YONEHARA, T ;
SAKAGUCHI, K ;
SATO, N .
APPLIED PHYSICS LETTERS, 1994, 64 (16) :2108-2110