Synthesis and gas sensing behavior of nanostructured V2O5 thin films prepared by spray pyrolysis

被引：70

作者：

Abbasi, M. ^{[1
]}

Rozati, S. M. ^{[1
]}

Irani, R. ^{[1
]}

Beke, S. ^{[2
]}

机构：

[1] Univ Guilan, Dept Phys, Rasht 41335, Guilan, Iran

[2] IIT, I-16163 Genoa, Italy

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2015年 / 29卷

关键词：

Spray pyrolysis; Substrate temperature; Nanocrystalline vanadium pentoxide; Gas sensor; Fractal analysis; VANADIUM PENTOXIDE FILMS; OPTICAL-PROPERTIES; SUBSTRATE-TEMPERATURE; FRACTAL DIMENSION; REDUCING GASES; SENSORS; SURFACES; MICROSTRUCTURE; DEPOSITION; GROWTH;

D O I：

10.1016/j.mssp.2014.01.008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanocrystalline vanadium pentoxide (V2O5) thin films have been deposited by a spray pyrolysis technique on preheated glass substrates. The substrate temperature was changed between 300 and 500 degrees C. The structural and morphological properties of the films were investigated by means of X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and atomic force microscopy (AFM). The influence of different substrate temperatures on ethanol response of V2O5 has also been investigated. XRD revealed that the films deposited at T-pyr=300 degrees C have low peak intensities, but the degree of crystallinity improved when the temperature was increased to 500 degrees C and films had orthorhombic structures with preferential orientations along the (0 0 1) direction. The fractal analysis showed a decreasing trend versus the pyrolysis temperature. Sensing properties of the samples were studied in the presence of ethanol vapor. The operating temperature of the sensor was optimized for the best gas response. The response increased linearly with different ethanol concentrations. It was found that films deposited at the lowest substrate temperature (300 degrees C) had the highest sensing response to ethanol. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：132 / 138

页数：7

共 38 条

[1] Thermal annealing effect on the crystallization and optical dispersion of sprayed V2O5 thin films
Akl, Alaa A.
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2010, 71 (03) : 223 - 229
[2] Structural and optical properties of pulsed laser deposited V2O5 thin films
Beke, S.
Giorgio, S.
Korosi, L.
Nanai, L.
Marine, W.
[J]. THIN SOLID FILMS, 2008, 516 (15) : 4659 - 4664
[3] Nd:YAG laser synthesis of nanostructuralV2O5 from vanadium oxide sols:: Morphological and structural characterizations
Beke, S.
Korosi, L.
Papp, S.
Nanai, L.
Oszko, A.
Kiss, J. G.
Safarov, V.
[J]. APPLIED SURFACE SCIENCE, 2007, 254 (05) : 1363 - 1368
[4] XRD and XPS analysis of laser treated vanadium oxide thin films
Beke, S.
Korosi, L.
Papp, S.
Oszko, A.
Nanai, L.
[J]. APPLIED SURFACE SCIENCE, 2009, 255 (24) : 9779 - 9782
[5] In-situ optical emission spectroscopy of laser-induced vanadium oxide plasma in vacuum
Beke, Szabolcs
Koroesi, Laszlo
Nanai, Laszlo
Brandi, Fernando
[J]. VACUUM, 2012, 86 (12) : 2002 - 2004
[6] A review of the growth of V2O5 films from 1885 to 2010
Beke, Szabolcs
[J]. THIN SOLID FILMS, 2011, 519 (06) : 1761 - 1771
[7] Benmoussa M., 2003, Active and Passive Electronic Components, V26, P245, DOI 10.1080/0882751031000116223
[8] First synthesis of vanadium oxide thin films by spray pyrolysis technique
Bouzidi, A
Benramdane, N
Nakrela, A
Mathieu, C
Khelifa, B
Desfeux, R
Da Costa, A
[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2002, 95 (02): : 141 - 147
[9] FRACTAL ANALYSES OF ANISOTROPIC FRACTURE SURFACES
Cox, B. L.
Wang, J. S. Y.
[J]. FRACTALS-COMPLEX GEOMETRY PATTERNS AND SCALING IN NATURE AND SOCIETY, 1993, 1 (03) : 547 - 559
[10] Thermochromic properties of vanadium oxide films prepared by dc reactive magnetron sputtering
Cui, Hai-Ning
Teixeira, Vasco
Meng, Li-Jian
Wang, Rong
Gao, Jin-Yue
Fortunato, Elvira
[J]. THIN SOLID FILMS, 2008, 516 (07) : 1484 - 1488

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