Investigation of Static and Dynamic Behavior of Functionally Graded Piezoelectric Actuated Poly-Si Micro Cantilever Probe

被引：4
|
作者：
Pandey, Vibhuti Bhushan [1 ]
Parashar, Sandeep Kumar [1 ]
机构：
[1] Rajasthan Tech Univ, Dept Mech Engn, Kota, India
来源：
2ND INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES: MICRO TO NANO 2015 (ETMN-2015) | 2016年 / 1724卷
关键词：
micro cantilever probe; atomic force microscope; functionally graded piezoelectric material; d(15) effect; ATOMIC-FORCE MICROSCOPY; PIEZOCERAMIC ACTUATORS; THIN-FILM; VIBRATIONS; BEAMS;
D O I：
10.1063/1.4945232
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d(15) has much higher value than coupling coefficients d(31) and d(33), hence in the present work the micro cantilever beam actuated by d(15) effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics (R) (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.
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页数：6
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