Optical fiber hydrogen sensor based on evaporated Pt/WO3 film

被引：43
|
作者：
Li, Zhi [1 ]
Yang, Minghong [1 ,2 ]
Dai, Jixiang [1 ]
Wang, Gaopeng [1 ]
Huang, Chujia [1 ]
Tang, Jianguan [1 ]
Hu, Wenbin [1 ]
Song, Han [3 ]
Huang, Pengcheng [3 ]
机构：
[1] Wuhan Univ Technol, Natl Engn Lab Fiber Opt Sensing Technol, Wuhan 430070, Peoples R China
[2] Wuhan Univ Technol, Minist Educ, Lab Fiber Opt Sensing Technol & Informat Proc, Wuhan 430070, Peoples R China
[3] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Wuhan 430074, Peoples R China
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2015年 / 206卷
基金：
美国国家科学基金会;
关键词：
Fiber optic hydrogen sensor; Thermal evaporation; Response value; GASOCHROMIC COLORATION; THIN-FILMS; WO3; RELIABILITY; PERFORMANCE;
D O I：
10.1016/j.snb.2014.09.093
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A reflective fiber optic hydrogen sensor based on evaporated Pt/WO3 film was proposed and experimentally demonstrated in this paper. The optical fiber hydrogen detection system employs a dual-path design of reflective intensity measurement, and therefore to eliminate the noise suffered from light source fluctuation, fiber loss fluctuation, and temperature. The hydrogen sensitive Pt/WO3 film deposited on fused quartz wafer was realized by vacuum thermal evaporation of WO3 and then magnetron sputtering of Pt. The correlation between hydrogen concentration and reflective intensity were investigated and analyzed. Amorphous Pt/WO3 film with porous micro-structure shows good hydrogen sensitive performance. The response value of the proposed sensor increases nonlinearly with hydrogen concentration and the resolution of this type of sensor in low range (0-0.5%) of hydrogen concentration is larger than that in high range (0.5-4%). It provided a simple, economical and effective method to obtain a high sensitivity and good repeatability for detecting a relatively low hydrogen concentration at the room temperature. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：564 / 569
页数：6
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