Synthesis and study of dielectric properties of PbTiO3 thin films

被引：11

作者：

Sidorkin, AS ^{[1
]}

Nesterenko, LP ^{[1
]}

Bocharova, IA ^{[1
]}

Sidorkin, VA ^{[1
]}

Smirnov, GL ^{[1
]}

机构：

[1] Voronezh State Univ, Dept Phys, Voronezh 394006, Russia

来源：

FERROELECTRICS | 2003年 / 286卷

关键词：

PbTiO3; thin films; magnetron sputtering; dielectric properties;

D O I：

10.1080/00150190390206536

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new way of synthesis of ferroelectric films of lead titanate is presented which is based on solid-phase reaction in oxygen ambient between the layers of titanium and lead deposited by magnetron sputtering onto a substrate. Dielectric properties of synthesized films have been investigated. Temperature dependence of dielectric permeability, as well as temperature and thickness dependences of coercive field in the investigated films were shown to be of the type that is characteristic of ferroelectric materials.

引用

页码：1057 / 1064

页数：8

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