LITHIUM NIOBATE THIN FILM BASED A3 MODE RESONATORS WITH HIGH EFFECTIVE COUPLING COEFFICIENT OF 6.72%

被引：10
作者：
Zhang, Yi [1 ]
Wang, Liang [2 ]
Zou, Yang [1 ]
Xu, Qinwen [1 ]
Liu, Jieyu [1 ]
Wang, Qing [2 ]
Tovstopyat, Alexander [1 ]
Liu, Wenjuan [1 ]
Sun, Chengliang [1 ]
Yu, Hongyu [2 ,3 ,4 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China
[2] Southern Univ Sci & Technol, Sch Microelect, Shenzhen, Peoples R China
[3] Shenzhen Inst Wide Bandgap Semicond, Shenzhen, Peoples R China
[4] Minist Educ, Engn Res Ctr Integrated Circuits Next Generat Com, Shenzhen, Peoples R China
来源：
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) | 2021年
基金：
中国国家自然科学基金;
关键词：
Lithium Niobate; A3; mode; Lamb wave; X-band; coupling coefficient; SAW;
D O I：
10.1109/MEMS51782.2021.9375462
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, 600nm Z-cut lithium niobate (LiNbO3) thin film based third-order antisymmetric (A3) mode resonators with different geometries has been investigated. Through a series of experiments, it has been found for the first time that effective electromechanical coupling coefficient (K-eff(2)) is influenced by the gap between electrodes (Ge), and K-eff(2) decreases with the increase of Ge when electrode pitch (P) higher than Sum. Finally, a A3 mode resonator with a high K-eff(2) of 6.72% is obtained. This K-eff(2) is the highest reported value in similar acoustic resonators working about 9 GHz and will be beneficial to the construction of X-band filters.
引用
收藏
页码：466 / 469
页数：4
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