共 50 条
- [41] Laser Produced Plasma Light Source Development for HVM EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY V, 2014, 9048
- [42] Influence of laser irradiance and helium ambient on the expansion of laser produced carbon plasma ECLIM 2000: 26TH EUROPEAN CONFERENCE ON LASER INTERACTION WITH MATTER, 2001, 4424 : 520 - 523
- [48] A laser produced plasma based reflectometer for EUV metrology EMERGING LITHOGRAPHIC TECHNOLOGIES IV, 2000, 3997 : 819 - 822
- [50] Laser-produced plasma source system development EMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2, 2007, 6517