Rapid prototyping of force/pressure sensors using 3D-and inkjet-printing

被引:25
作者
Faller, L-M [1 ]
Granig, W. [2 ]
Krivec, M. [3 ]
Abram, A. [4 ]
Zangl, H. [1 ]
机构
[1] Alpen Adria Univ Klagenfurt, Univ Str 65-67, A-9020 Klagenfurt, Austria
[2] Infineon Technol Austria AG, Siemensstr 2, A-9500 Villach, Austria
[3] Carinthian Tech Res, Europastr 12, A-9500 Villach, Austria
[4] Jozef Stefan Inst, Jamova Cesta 39, Ljubljana 1000, Slovenia
基金
欧盟地平线“2020”;
关键词
rapid prototyping; 3D-printing; inkjet-printing; pressure sensor; capacitive sensing; PRESSURE SENSOR; FABRICATION; DESIGN;
D O I
10.1088/1361-6439/aaadf4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work reports on inkjet- and 3D-printed force/pressure sensing devices. The employed printing processes can enable cost- and resource-efficient, fast and flexible designs compared to solid-state technology which is used as a reference design. The pressure sensing devices are realized as either 3D-printed steel or 3D-printed ceramic diaphragms. Both designs thus withstand harsh environmental conditions and elevated temperatures. Additionally, the increased size guarantees less sensitivity to dirt or moisture due to the larger diameter of the diaphragms. The hardware used for the capacitive sensor read-out is based on a shunt measurement system and subsequent demodulation. This architecture enables long cabling, allowing for large parasitic capacitances, without significant loss of transferred signal power, due to the employed power matching to the transmission line. Physical analyses such as contact angle measurements, profilometer measurements, and focused ion beam analysis are done to characterize the resulting printed surfaces. Then, the response of both designs is evaluated by applying force on the diaphragms surface using a moveable load cell. The gathered results are also compared to finite element method simulations.
引用
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页数:11
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