Design and simulation of an integrated metal oxide based micro NO2 gas sensor

被引：0

作者：

Li, Ling-Han ^{[1
]}

Dao, Dzung Viet ^{[1
]}

Sugiyama, Susumu ^{[1
]}

机构：

[1] Ritsumeikan Univ, Fac Engn Sci, Dept Micro Syst Technol, 1-1-1 Noji-Higashi, Kusatsa, Shiga 525, Japan

来源：

2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE | 2006年

关键词：

NO2; sensor; metal oxide gas sensor; thin film WO3; micro heater; computer-aided simulation;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

In this paper, a novel design of metal-oxide NO2 gas sensor integrated with micro heaters is presented. This gas sensor is ultra small, with the size of 500 mu mx500 mu m. It has low power consumption less than 10 mW and high sensitivity up to 0.1ppm. The structure of gas sensor was designed, and computer-aided multi-physic simulations were carried out to analyze and optimize the performance of the gas sensor. Then the sensing circuit is designed and simulated. Finally, the fabrication process of the sensor is discussed.

引用

页码：25 / +

页数：2

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