Photoelectron spectra enhanced by x-ray total reflection and diffraction from periodic multilayer

被引:22
作者
Hayashi, K
Kawato, S
Horiuchi, T
Matsushige, K
Kitajima, Y
Takenaka, H
Kawai, J
机构
[1] NATL LAB HIGH ENERGY PHYS, PHOTON FACTORY, TSUKUBA, IBARAKI 305, JAPAN
[2] NIPPON TELEGRAPH & TEL PUBL CORP, INTERDISCIPLINARY RES LABS, MUSASHINO, TOKYO 180, JAPAN
[3] KYOTO UNIV, DEPT MAT SCI & ENGN, SAKYO KU, KYOTO 60601, JAPAN
关键词
D O I
10.1063/1.115626
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photoelectron spectra from a periodic multilayer of (Mo/B4C)(30)/Si were measured by changing the x-ray glancing angle. The angular dependencies of the photoelectron intensities of 0 1s and Mo 3d revealed the atomic depth profiles of the Mo oxide overlayer, and the compositions of the MoO3 upper layer and MoO2 lower layer. Furthermore, we observed enhancement of photoelectron emission by means of x-ray standing waves generated near the multilayer surface during x-ray diffraction from the superlattice. (C) 1996 American Institute of Physics.
引用
收藏
页码:1921 / 1923
页数:3
相关论文
共 20 条
[11]   IMPROVEMENTS AND RECENT PERFORMANCE OF A DOUBLE-CRYSTAL MONOCHROMATOR FOR A SOFT-X-RAY UNDULATOR AT THE PHOTON FACTORY [J].
KITAJIMA, Y ;
TAKATA, Y ;
TOYOSHIMA, A ;
MAEZAWA, H .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (01) :886-889
[12]   X-RAY TOTAL-EXTERNAL-REFLECTION-BRAGG DIFFRACTION - STRUCTURAL STUDY OF THE GAAS-AL INTERFACE [J].
MARRA, WC ;
EISENBERGER, P ;
CHO, AY .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) :6927-6933
[13]   ANGULAR-DEPENDENT X-RAY PHOTOEMISSION STUDY OF OXIDIZED SILICON AT LOW X-RAY INCIDENCE ANGLES [J].
MEHTA, M ;
FADLEY, CS .
CHEMICAL PHYSICS LETTERS, 1977, 46 (02) :225-230
[14]   ENHANCEMENT OF SURFACE-ATOM INTENSITIES IN X-RAY PHOTOELECTRON-SPECTRA AT LOW X-RAY INCIDENCE ANGLES [J].
MEHTA, M ;
FADLEY, CS .
PHYSICS LETTERS A, 1975, 55 (01) :59-61
[15]  
MINNI E, 1988, SURF INTERFACE ANAL, V385, P12
[16]   THE OXIDATION OF MO(100) STUDIED BY XPS AND SURFACE RAMAN-SPECTROSCOPY - THE ONSET OF MOO2 FORMATION AND THE FORMATION OF SURFACE POLYMOLYBDATE [J].
SMUDDE, GH ;
STAIR, PC .
SURFACE SCIENCE, 1994, 317 (1-2) :65-72
[17]  
TAKATA Y, 1992, J SCI HIROSHIMA U A, V56, P1
[18]  
TAKENAKA H, 1995, P EXTR ULTR LITH, V23, P26
[19]   CALCULATIONS OF ELECTRON INELASTIC MEAN FREE PATHS FOR 31 MATERIALS [J].
TANUMA, S ;
POWELL, CJ ;
PENN, DR .
SURFACE AND INTERFACE ANALYSIS, 1988, 11 (11) :577-589
[20]   OPTICAL FLATS FOR USE IN X-RAY SPECTROCHEMICAL MICROANALYSIS [J].
YONEDA, Y ;
HORIUCHI, T .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (07) :1069-&