Lead Salt Resonant Cavity Enhanced Detector with MEMS Mirror

被引：5

作者：

Felder, F. ^{[1
]}

Fill, M. ^{[1
]}

Rahim, M. ^{[1
]}

Zogg, H. ^{[1
]}

Quack, N. ^{[2
]}

Blunier, S. ^{[2
]}

Dual, J. ^{[2
]}

机构：

[1] Swiss Fed Inst Technol, Thin Film Phys Grp, Technopk Str 1, CH-8005 Zurich, Switzerland

[2] Swiss Fed Inst Technol, Inst Mech Syst, CH-8093 Zurich, Switzerland

来源：

PROCEEDINGS OF THE 14TH INTERNATIONAL CONFERENCE ON NARROW GAP SEMICONDUCTORS AND SYSTEMS | 2010年 / 3卷 / 02期

关键词：

Resonant cavity enhanced detector; RCED; infrared detector; MEMS; micromirror;

D O I：

10.1016/j.phpro.2010.01.150

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a tunable resonant cavity enhanced detector (RCED) for the mid-infrared employing narrow gap lead-chalcogenide (IV-VI) layers on a Si substrate. The device consists of an epitaxial Bragg reflector layer, a thin p-n(+) heterojunction with PbSrTe as detecting layer and a micro-electro-mechanical system (MEMS) micromirror as second mirror. Despite the thin absorber layer the sensitivity is even higher than for a conventional detector. Tunability is achieved by changing the cavity length with a vertically movable MEMS mirror. The device may be used as miniature infrared spectrometer to cover the spectral range from < 3 mu m up to > 30 mu m.

引用

页码：1127 / 1131

页数：5

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