Nonpolar a-plane ZnO films fabricated on (302)γ-LiAlO2 by pulsed laser deposition

被引：27

作者：

Zhou, Shengming ^{[1
]}

Zhou, Jianhua

Huang, Taohua

Li, Shuzhi

Zou, Jun

Wang, Jun

Zhang, Xia

Li, Xiaomin

Zhang, Rong

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China

[3] Nanjing Univ, Key Lab Adv Photon & Elect Mat, Nanjing 210093, Peoples R China

[4] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China

来源：

JOURNAL OF CRYSTAL GROWTH | 2007年 / 303卷 / 02期

关键词：

atomic force microscopy; substrates; X-ray diffraction; laser epitaxy; semiconducting II-VI materials;

D O I：

10.1016/j.jcrysgro.2007.01.029

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Nonpolar a-plane (1 1 2 0) ZnO films are fabricated on (3 0 2)gamma-LiAlO2 substrate by pulsed laser deposition. When substrate temperature is low, c-plane ZnO is dominant. As growth temperature increases to similar to 500 degrees C, pure (1 1 2 0)-oriented ZnO film can be obtained. The X-ray rocking curve of a-plane ZnO film broadens sharply when growth temperature is up to similar to 650 degrees C; such a broadening may be related to the anisotropic lateral growth rate of (1 12 0)-oriented ZnO grains. Atomic force microscopy reveals the surface morphology changes of ZnO films deposited at different temperatures. Raman spectra reveal that a compressive stress exists in the a-plane ZnO film. (C) 2007 Published by Elsevier B.V.

引用

页码：510 / 514

页数：5

共 50 条

[41] ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target [J].

Zhao, Jie ;

Hu, Lizhong ;

Wang, Zhaoyang ;

Sun, Jie ;

Wang, Zhijun .

APPLIED SURFACE SCIENCE, 2006, 253 (02) :841-845

[42] Microstructure of VO2 Thin Films Synthesized by Pulsed Laser Deposition [J].

Romanitan, Cosmin ;

Caicedo, Jose Manuel ;

Pascu, Razvan ;

Mihalache, Iuliana ;

Gavrila, Raluca ;

Stoian, Marius ;

Djourelov, Nikolay ;

Padilla-Pantoja, Jessica .

ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY, 2024, 27 (02) :229-240

[43] Pulsed laser deposition of Bi2Te3 thin films [J].

Dauscher, A ;

Thomy, A ;

Scherrer, H .

THIN SOLID FILMS, 1996, 280 (1-2) :61-66

[44] Pulsed laser deposition of Bi2Te3 thermoelectric films [J].

Bailini, A. ;

Donati, F. ;

Zamboni, M. ;

Russo, V. ;

Passoni, M. ;

Casari, C. S. ;

Bassi, A. Li ;

Bottani, C. E. .

APPLIED SURFACE SCIENCE, 2007, 254 (04) :1249-1254

[45] Pulsed laser deposition of anatase and rutile TiO2 thin films [J].

Murugesan, S. ;

Kuppusami, P. ;

Parvathavarthini, N. ;

Mohandas, E. .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (18) :7713-7719

[46] Pulsed laser deposition of ZnGa2O4 phosphor films [J].

Reshmi, R ;

Krishna, KM ;

Manoj, R ;

Jayaraj, MK .

SURFACE & COATINGS TECHNOLOGY, 2005, 198 (1-3) :345-349

[47] Structure and photoluminescence of ultrathin films of SnO2 nanoparticles synthesized by means of pulsed laser deposition [J].

Gaidi, M. ;

Hajjaji, A. ;

Smirani, R. ;

Bessais, B. ;

El Khakani, M. A. .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (06)

[48] Dielectric properties of Co-doped Ba0.5Sr0.5TiO3 thin films fabricated by pulsed laser deposition [J].

Wang, SY ;

Cheng, BL ;

Wang, C ;

Lu, HB ;

Zhou, YL ;

Chen, ZH ;

Yang, GZ .

JOURNAL OF CRYSTAL GROWTH, 2003, 259 (1-2) :137-143

[49] Ultraviolet emission from MgZnO films and ZnO/MgZnO single quantum wells grown by pulsed laser deposition [J].

Wang, Xu ;

Chen, Zhengwei ;

Hu, Congyu ;

Saito, Katsuhiko ;

Tanaka, Tooru ;

Nishio, Mitsuhiro ;

Guo, Qixin .

JOURNAL OF CRYSTAL GROWTH, 2018, 483 :39-43

[50] Growth and properties of ZnO thin film on β-Ga2O3(100) substrate by pulsed laser deposition [J].

Zhang, Jungang ;

Li, Bin ;

Xia, Changtai ;

Deng, Qun ;

Xu, Jun ;

Pei, Guangqing ;

Wu, Feng ;

Wu, Yongqing ;

Shi, Hongsheng ;

Xu, Wusheng ;

Yang, Zhaohui .

JOURNAL OF CRYSTAL GROWTH, 2006, 296 (02) :186-190

← 1 2 3 4 5 →