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- [1] Sensitivity of scanning electron microscope width measurements to model assumptions JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 8 (03):
- [2] NEW Scanning Electron Microscope Magnification Calibration Reference Material (RM) 8820 SCANNING MICROSCOPY 2010, 2010, 7729
- [3] The image of a line width test object in a scanning electron microscope with different energies of the probe electrons Measurement Techniques, 2009, 52 : 713 - 718