High-power low-droop violet semipolar (30(3)over-bar(1)over-bar) InGaN/GaN light-emitting diodes with thick active layer design

被引:49
作者
Becerra, Daniel L. [1 ]
Zhao, Yuji [1 ]
Oh, Sang Ho [2 ]
Pynn, Christopher D. [1 ]
Fujito, Kenji [3 ]
DenBaars, Steven P. [1 ,2 ]
Nakamura, Shuji [1 ,2 ]
机构
[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[3] Mitsubishi Chem Corp, Optoelect Lab, Ushiku, Ibaraki 3001295, Japan
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.4900793
中图分类号
O59 [应用物理学];
学科分类号
摘要
Devices grown on nonpolar and semipolar planes of GaN offer key performance advantages over devices grown on the conventional c-plane, including reduced polarization fields. This allows for a wider design space on semipolar planes for light emitting diodes (LEDs) to address the problem of efficiency droop at high current densities. LED structures with very thick (10-100 nm) InGaN single-quantum-well/double heterostructure active regions were grown using conventional metal organic chemical vapor deposition on semipolar (30 (3) over bar(1) over bar) free-standing GaN substrates and processed and packaged using conventional techniques. Simulated band diagrams showed reduced polarization fields on the (30 (3) over bar(1) over bar) plane. The calculated critical thickness for misfit dislocation formation is higher on the (30 (3) over bar(1) over bar) plane than on other semipolar planes, such as (20 (2) over bar(1) over bar), allowing for thicker active regions than our previous work to further reduce droop. The higher critical thickness was confirmed with defect characterization via cathodoluminescence. A trend is demonstrated in lower efficiency droop for devices with thicker active regions. Thermal droop characteristics of these devices are also presented. These observed results were utilized to demonstrate over 1W of output power at a current density of 1 kA/cm(2) from a single 0.1 mm(2) LED device. (C) 2014 AIP Publishing LLC.
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页数:4
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