Absolute figure measurements with a liquid-flat reference

被引：34

作者：

Powell, I ^{[1
]}

Goulet, E ^{[1
]}

机构：

[1] Natl Res Council Canada, Opt Grp, Ottawa, ON K1A 0R6, Canada

来源：

APPLIED OPTICS | 1998年 / 37卷 / 13期

关键词：

D O I：

10.1364/AO.37.002579

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a variation of the liquid-flat technique for determining the absolute flatness of a 240-mm-diameter optical surface to an accuracy better than 1/100 lambda in both its horizontal (three-point support) and vertical orientations. Using the appropriate mathematics to calculate the surface deformation of a disk due to gravity, we achieved verification of the method by comparing measurements carried out on a pair of optical flats and a liquid reference surface. (C) 1998 Optical Society of America.

引用

页码：2579 / 2588

页数：10

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