Development of a piezoelectric micropump with novel separable design

In this study, partially disposable piezoelectric micropumps with separable design have been developed and discussed. The actuator, a rectangular piezo-plate, can be separated and be used repeatedly while the pump chamber is single-use to prevent infection. Thus, a low cost and waste solution for biomedical uses is achieved. Central bossed design of diaphragm was used to achieve self-return in supply mode. More, pump chambers with different depths and diameters have been made. The maximum flow rate, 15.03 ml/min, is reached under 60V actuated voltage.