Improvement of angle-resolved electron energy analyser for high-performance x-ray photoelectron diffraction measurements

被引：3
作者：
Mamishin, S
Mochizuki, H
Ishii, H
Kobayashi, H
Iwai, H
Watanabe, K
Taguchi, M
Owari, M
Nihei, Y
机构：
[1] Sci Univ Tokyo, Fac Sci & Technol, Chiba 2788510, Japan
[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
[3] Kyoto Univ, Dept Mat Sci & Engn, Sakyo Ku, Kyoto 6068501, Japan
[4] Ulvac Japan Ltd, PHI, Kanagawa 2530084, Japan
[5] Univ Tokyo, Ctr Environm Sci, Bunkyo Ku, Tokyo 1130033, Japan
来源：
SURFACE AND INTERFACE ANALYSIS | 2005年 / 37卷 / 02期
关键词：
photoelectron diffraction; diffraction plane aperture; multi-channel detector; high-precision (large signal-to-noise ratio) measurement; rapid measurement; high-speed detection system; XPS; XPED;
D O I：
10.1002/sia.1970
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
For more precise and rapid x-ray photoelectron diffraction (XPED) measurements, we have improved an angle-resolved electron energy analyser developed a 1.4 diffraction plane aperture mode, and a novel high-speed 64-channel detector. In this study, a large number of photoelectrons from a newly developed diffraction plane aperture mode were detected by a novel high-speed detector, facilitating rapid and precise XPED measurements. The Ti 2p XPED patterns from an SrTiO3(001) surface also revealed the performance of this improved analyser. In addition, high-speed XPS measurements from an Ag polycrystal were performed for several milliseconds. Copyright (C) 2005 John Wiley Sons, Ltd.
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收藏
页码：225 / 229
页数：5
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