CO2 gas sensing properties of La2O3 thin films deposited at various substrate temperatures

被引：12

作者：

Yadav, A. A. ^{[1
]}

Lokhande, A. C. ^{[3
]}

Shinde, P. A. ^{[1
]}

Kim, J. H. ^{[3
]}

Lokhande, C. D. ^{[2
]}

机构：

[1] Shivaji Univ, Dept Phys, Thin Film Phys Lab, Kolhapur 416004, Maharashtra, India

[2] DY Patil Univ, Kolhapur, Maharashtra, India

[3] Chonnam Natl Univ, Dept Mat Sci & Engn, Photon & Elect Thin Film Lab, Gwangju 500757, South Korea

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2017年 / 28卷 / 17期

基金：

新加坡国家研究基金会;

关键词：

CHEMICAL ROUTE; SENSOR; PD; NANOPARTICLES; PERFORMANCE; MECHANISM; OXIDE; NO2;

D O I：

10.1007/s10854-017-7144-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Carbon dioxide gas (CO2) sensing properties of La2O3 thin films synthesized by spray pyrolysis method are reported. La2O3 thin films deposited at different substrate temperatures (573-623 K) are characterized for their structural, surface morphology, optical and electrical properties and used for CO2 gas response measurements. SEM analyses indicate porous surface morphology. The deposited La2O3 films are crystalline with pronounced orientation along (110) plane, uniform and adhere to the glass substrate. From optical absorbance studies, the optical band gap is found to be 4.2 eV. With porous surface morphology, the maximum response of 18% at 623 K substrate temperature is recorded on exposure of 350 ppm of CO2 gas.

引用

页码：13112 / 13119

页数：8

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