Preparation and properties of conductive LaNiO3 thin films by a thermal decomposition of water-based solutions

被引:19
|
作者
Ling, Y [1 ]
Ren, W [1 ]
Wu, XQ [1 ]
Zhang, LY [1 ]
Yao, X [1 ]
机构
[1] Xian Jiao Tong Univ, Elect Mat Res Lab, Xian 710049, Peoples R China
关键词
conductivity; deposition process; electrical properties and measurements; X-ray diffraction;
D O I
10.1016/S0040-6090(97)00445-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Conductive LaNiO3 (LNO) thin films were prepared by a thermal decomposition of water-based solutions. The structures, morphologies and resistivity of the LNO films are investigated as a function of thermal annealing rates and temperatures, and additives. Experimental results show that the LNO films annealed at a slow heating rate and without additive glycine have uniform and dense surface. The room-temperature resistivity of the films annealed at 650 degrees C similar to 700 degrees C is about 0.81 m Ohm cm. The rapid thermal annealing and addition of glycine in precursor solution lead to the deteriorated surface and lar er resistivity. Published by Elsevier Science S.A.
引用
收藏
页码:128 / 132
页数:5
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