A ROBUST BATCH-FABRICATED HIGH-DENSITY COCHLEAR ELECTRODE ARRAY

被引：10

作者：

Johnson, Angelique C. ^{[1
]}

Wise, Kensall D. ^{[1
]}

机构：

[1] Univ Michigan, Ctr Wireless Integrated MicroSyst, Ann Arbor, MI 48109 USA

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

关键词：

D O I：

10.1109/MEMSYS.2010.5442379

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a fully batch-fabricated cochlear electrode array with built-in curl and stiffness control. The array is fabricated from stacked layers of parylene and metal with an integrated backing structure formed by parylene rings. The dual-function rings set the stiffness of the device and allow the array to be positioned inside the cochlea using a standard stylet wire approach. Metal-based stress-compensated layers are used to pre-curl the array so that it hugs the modiolus after insertion. A 32-site array with IrO sites on 250 mu m centers is realized.

引用

页码：1007 / 1010

页数：4

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