Phosphites as precursors in atomic layer deposition thin film synthesis

被引：3

作者：

Kvamme, Kristian B. ^{[1
]}

Ruud, Amund ^{[1
]}

Weibye, Kristian ^{[1
]}

Sajavaara, Timo ^{[2
]}

Nilsen, Ola ^{[1
]}

机构：

[1] Univ Oslo, Ctr Mat Sci & Nanotechnol, Dept Chem, POB 1033, N-0315 Oslo, Norway

[2] Univ Jyvaskyla, Dept Phys, POB 35, FIN-40014 Jyvaskyla, Finland

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2021年 / 39卷 / 03期

关键词：

PHOSPHATE; ALUMINUM; GROWTH;

D O I：

10.1116/6.0000844

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We here demonstrate a new route for deposition of phosphorous based materials by atomic layer deposition (ALD) using the phosphites Me3PO3 or Et3PO3 as precursors. These contain phosphorous in the oxidation state (III) and are open for deposition of reduced phases by ALD. We have investigated their applicability for the synthesis of LiPO and AlPO materials and characterized their growth by means of in situ quartz crystal microbalance. Phosphites are good alternatives to the established phosphate-based synthesis routes as they have high vapor pressure and are compatible with water as a coreactant during deposition. The deposited materials have been characterized using XPS, x-ray fluorescence, and ion beam analysis for composition analysis, spectroscopic ellipsometry for thickness, and FTIR for local structure.

引用

页数：8

共 30 条

[21] Growth of manganese oxide thin films by atomic layer deposition
Nilsen, O
Fjellvåg, H
Kjekshus, A
[J]. THIN SOLID FILMS, 2003, 444 (1-2) : 44 - 51
[22] Simulation of growth dynamics in atomic layer deposition.: Part III.: Polycrystalline films from tetragonal crystallites
Nilsen, Ola
Karlsen, Ole Bjorn
Kjekshus, Arne
Fjellvag, Helmer
[J]. THIN SOLID FILMS, 2007, 515 (11) : 4550 - 4558
[23] Atomic layer deposition of ferroelectric LiNbO3
Ostreng, Erik
Sonsteby, Henrik H.
Sajavaara, Timo
Nilsen, Ola
Fjellvag, Helmer
[J]. JOURNAL OF MATERIALS CHEMISTRY C, 2013, 1 (27) : 4283 - 4290
[24] Porous aluminophosphates: From molecular sieves to designed acid catalysts
Pastore, HO
Coluccia, S
Marchese, L
[J]. ANNUAL REVIEW OF MATERIALS RESEARCH, 2005, 35 : 351 - 395
[25] Atomic layer deposition of lithium containing thin films
Putkonen, Matti
Aaltonen, Titta
Alnes, Mari
Sajavaara, Timo
Nilsen, Ola
Fjellvag, Helmer
[J]. JOURNAL OF MATERIALS CHEMISTRY, 2009, 19 (46) : 8767 - 8771
[26] Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films
Putkonen, Matti
Sajavaara, Timo
Rahkila, Paavo
Xu, Leiting
Cheng, Sulin
Niinistoe, Lauri
Whitlow, Harry J.
[J]. THIN SOLID FILMS, 2009, 517 (20) : 5819 - 5824
[27] STRUCTURAL EVOLUTION IN ALUMINA GEL
SARASWATI, V
RAO, GVN
RAO, GVR
[J]. JOURNAL OF MATERIALS SCIENCE, 1987, 22 (07) : 2529 - 2534
[28] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG
SAUERBREY, G
[J]. ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02): : 206 - 222
[29] Atomic Layer Deposition of LaPO4 and Ca:LaPO4
Sonsteby, Henrik Hovde
Ostreng, Erik
Fjellvag, Helmer
Nilsen, Ola
[J]. CHEMICAL VAPOR DEPOSITION, 2014, 20 (7-9) : 269 - 273
[30] Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries
Wang, Biqiong
Liu, Jian
Sun, Qian
Li, Ruying
Sham, Tsun-Kong
Sun, Xueliang
[J]. NANOTECHNOLOGY, 2014, 25 (50)

← 1 2 3 →