The structure, device processing and performance of a 2GHz, 60Watt silicon LDMOS RF power transistor are described. At 2GHz with a 26Vdc drain operating voltage this device has 1dB power gain compression at 63 Watts CW and 44% drain efficiency. Under two-tone test conditions, at 60 Watts peak output, 11.2dB power gain is realized with less than -30dBc intermodulation distortion and greater than 30% drain efficiency. Excellent linearity is maintained over a wide dynamic range.