Extended crystallographic defects in gallium nitride

被引:4
|
作者
Dasilva, Yadira Arroyo Rojas [1 ]
Ruterana, Pierre [1 ]
Lahourcade, Lise [2 ]
Monroy, Eva [2 ]
Nataf, Gilles [3 ]
机构
[1] ENSICAEN, CIMAP, UMR 6252, CNRS,CEA,UCBN, 6 Blvd Marechal Juin, F-14050 Caen 4, France
[2] INAC, PSC, SP2M, F-38054 Grenoble, France
[3] CNRS, CRHEA, UPR 10, F-06560 Valbonne, France
关键词
GaN; defects; dislocations; stacking faults; polar; non-polar and semi-polar; TEM; INVERSION DOMAIN BOUNDARIES; RESOLUTION ELECTRON-MICROSCOPY; THREADING DISLOCATIONS; ATOMIC CONFIGURATIONS; GAN LAYERS; SCREW DISLOCATIONS; STACKING-FAULTS; 0001; SAPPHIRE; REDUCTION; DENSITY;
D O I
10.4028/www.scientific.net/MSF.644.117
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In the fabrication GaN-based devices, several growth orientations are currently under investigation in order to exploit material properties which are inaccessible using layers grown along the c-axis. However, such procedures rely on foreign substrates with large misfits. Therefore, complex crystallographic defects form in the epitaxial layers and have been the subject of extensive studies. They include threading dislocations and stacking faults, which can be within basal or prismatic planes. Out of the c-axis, depending on the growth orientation, the glide planes of perfect dislocations may be no longer available, complicating the relaxation processes.
引用
收藏
页码:117 / +
页数:3
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