Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy

被引：20

作者：

Pikalek, Tomas ^{[1
]}

Fort, Tomas ^{[1
]}

Buchta, Zdenek ^{[1
]}

机构：

[1] Acad Sci Czech Republic, Inst Sci Instruments, CS-61264 Brno, Czech Republic

来源：

APPLIED OPTICS | 2014年 / 53卷 / 36期

关键词：

INTERFEROGRAMS;

D O I：

10.1364/AO.53.008463

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper deals with interference fringe center detection techniques used in low-coherence interferometry for contactless 3D inspection of macroscopic objects. It presents a complex analysis of several frequently used detection techniques and shows their impact on the measurement accuracy. The analysis compares those techniques in terms of computational complexity, measurement accuracy, and resistance to optical dispersion caused by wedge-shaped optical components. (C) 2014 Optical Society of America

引用

页码：8463 / 8470

页数：8

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