Plasma and antenna characteristics of a linearly extended inductively coupled plasma system using multi-polar magnetic field

被引：5

作者：

Kim, Kyong Nam ^{[1
]}

Lim, Jong Hyeuk ^{[1
]}

Yeom, Geun Young ^{[1
]}

机构：

[1] Sungkyunkwan Univ, Dept Mat Engn, Suwon 440746, South Korea

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 12期

关键词：

ICP; large-area; display; magnetic confinement;

D O I：

10.1016/j.tsf.2006.10.057

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel internal-type linear inductive antenna, referred to as a "double comb-type antenna", was used as a large-area plasma source with a substrate area of 880 mm x 660 mm. This study investigated the effect of a multi-polar magnetic field on plasma confinement. High density plasma in the order of 3.2 x 10(11) cm(-3), which is 50% higher than that obtained for a source without a magnetic field, with good plasma stability was obtained at a pressure of 15 mTorr Ar and an RF power of 5000 W. Plasma uniformity < 3% within the substrate area was also obtained. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：5193 / 5196

页数：4

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