Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition

被引：31
作者：
Nakazawa, H
Yamagata, Y
Suemitsu, M
Mashita, A
机构：
[1] Hirosaki Univ, Fac Sci & Technol, Dept Mat Sci & Technol, Hirosaki, Aomori 0368561, Japan
[2] Tohoku Univ, Interdisciplinary Res Ctr, Sendai, Miyagi 9808578, Japan
来源：
THIN SOLID FILMS | 2004年 / 467卷 / 1-2期
关键词：
diamond-like carbon; pulsed laser deposition; Raman scattering; X-ray photoelectron spectroscopy;
D O I：
10.1016/j.tsf.2004.03.013
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm(-1), respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the SP3 bonds in the deposited films, as evaluated from the Cls-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 degreesC show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed. (C) 2004 Elsevier B.V. All rights reserved.
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页码：98 / 103
页数：6
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