Solution-processed Li-doped ZnSnO metal-semiconductor-metal UV photodetectors

被引:9
作者
Lin, Pei-Te [1 ]
Huang, Wen-Chun [2 ,3 ]
Lou, Yu-Qian [2 ]
Yan, Cing-Yuan [2 ]
Lin, Yu-Syuan [2 ]
Chang, Chiao-Li [2 ]
Chang, Po-Chih [2 ]
Gong, Jyh-Rong [3 ]
Hsueh, Wen-Jeng [1 ]
Huang, Chun-Ying [2 ]
机构
[1] Natl Taiwan Univ, Dept Engn Sci & Ocean Engn, Photon Grp, Taipei 10660, Taiwan
[2] Natl Chi Nan Univ, Dept Appl Mat & Optoelect Engn, Nantou 54561, Taiwan
[3] Natl Chung Hsing Univ, Dept Phys, Taichung 40227, Taiwan
关键词
ZnSnO photodetector; oxygen vacancy; sol-gel; Li-doping; THIN-FILM TRANSISTORS; ULTRAVIOLET PHOTODETECTOR; ELECTRICAL CHARACTERISTICS; TEMPERATURE; REALIZATION; PERFORMANCE; STABILITY; SENSORS;
D O I
10.1088/1361-6463/ac03e8
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical performance of thin-film transistors that use an amorphous oxide semiconductor (AOS) is significantly improved by incorporating metal cations as carrier suppressors. However, the effect of these elements on the performance of AOS-based photodetectors (PDs) is still unknown. This study uses a precursor containing lithium (Li) element and a sol-gel process to produce a Li-doped amorphous ZnSnO (a-ZTO) thin-film for UV PD applications. The results of x-ray photoelectron spectroscopy analysis show that the number of oxygen vacancies (V (o)) in a-ZTO thin-films decreases significantly from similar to 32.1% to similar to 14.4% after Li-doping (3 at%). The dark current decreases and the photocurrent increases in the ZTO-based PD so an ultra-high photo-to-dark current ratio (PDCR) of 1185 is achieved. The significant increase in PDCR means that solution-processed a-ZTO are eminently suited to use in UV PDs that use In-free AOSs.
引用
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页数:8
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