Fabrication and characterization of humidity sensor based on (Li2MoO4)x(CaMoO4)1-x system

被引：5

作者：

Kim, IJ

Do Han, S ^{[1
]}

Lee, HD

Wang, JS

Singh, I

Komijov, SV

机构：

[1] Korea Inst Energy Res, Sensors & Adv Mat Lab, Taejon, South Korea

[2] Chungnam Natl Univ, Dept Elect, Taejon 305764, South Korea

[3] Maharshi Dayanand Univ, Dept Chem, Rohtak 124001, Haryana, India

[4] RRC Kurachov Inst, Inst Mol Phys, Moscow 123182, Russia

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2005年 / 116卷 / 02期

关键词：

(Li2MoO4)(x)(CaMoO4)(1-x); single crystal; wafer cutting; low humidity sensor; protective layer;

D O I：

10.1016/j.mseb.2004.10.012

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The characteristics of a humidity sensor using a water-soluble and a single crystal material with composition (Li2MoO4)(x)(CaMoO4)(1-x), where x is 0.8-0.9 have been studied in detail. The fabrication technology has been developed for a low humidity sensor. The specific procedures with the use of polystyrol and teflon combination as protective layer have been developed for technological sensors by microelectronics techniques. The logarithm of the sensor conductance log or is linear decreasing function of ratio log(2)(C-s/C), where C-s is the concentration of saturated water vapours and C is the concentration of water vapours to be detected up to 8000 ppm. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：226 / 230

页数：5

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