Optical coupling mechanisms in quantum well infrared photodetectors

被引：0

作者：

Bandara, S ^{[1
]}

Gunapala, S ^{[1
]}

Liu, J ^{[1
]}

Hong, W ^{[1
]}

Park, J ^{[1
]}

机构：

[1] CALTECH, Jet Prop Lab, Ctr Space Microelect Technol, Pasadena, CA 91109 USA

来源：

LONG WAVELENGTH INFRARED DETECTORS AND ARRAYS: PHYSICS AND APPLICATIONS V | 1997年 / 33卷

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Alternate light coupling system, such as gratings are required because Quantum Well Infrared Photodetectors do not respond to normal incident light due to the quantum mechanical selection rules associated with intersubband transitions. The resolution of the photolithography and accuracy of the etching become key issues in producing smaller grating feature sizes especially in shorter wavelengths. A factor of three enhancement due to 2D periodic grating fabricated on QWIP structure was observed. Variation of the enhancement factor with grove depth and feature size of the grating can be theoretically explained.

引用

页码：191 / 198

页数：8