Quasi-absolute interferometric testing of cylinders

被引：5
作者：
Chen, Shanyong [1 ]
Dai, Yifan [1 ]
Zhai, Dede [1 ]
Xiong, Yupeng [1 ]
机构：
[1] Natl Univ Def Technol, Coll Intelligence Sci & Technol, Lab Sci & Technol Integrated Logist Support, Changsha 410073, Peoples R China
来源：
OPTICS LETTERS | 2022年 / 47卷 / 09期
基金：
中国国家自然科学基金;
关键词：
13;
D O I：
10.1364/OL.456783
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A three-step quasi-absolute testing method for optical cylinders is proposed in this Letter. Three measurements are taken at the so-called cat's eye position and confocal null testing positions with a computer-generated hologram (CGH) rotated around the axis parallel to that of the cylinder. The quasi-absolute surface error of the cylinder is obtained by simple operations including addition/subtraction and flip of the datasets. The uncertainty is traceable to an optical flat. Two different CGHs are used for a convex cylinder and give consistent quasi-absolute testing results of the surface error, which experimentally validates the method. (C) 2022 Optica Publishing Group
引用
收藏
页码：2278 / 2281
页数：4
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