Filtering performance improvement in V-doped ZnO/diamond surface acoustic wave filters

被引：45

作者：

Luo, J. T. ^{[1
]}

Zeng, F. ^{[1
]}

Pan, F. ^{[1
]}

Li, H. F. ^{[2
]}

Niu, J. B. ^{[2
]}

Jia, R. ^{[2
]}

Liu, M. ^{[2
]}

机构：

[1] Tsinghua Univ, Key Lab Adv Mat, Dept Mat Sci & Engn, Beijing 100084, Peoples R China

[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2010年 / 256卷 / 10期

基金：

中国国家自然科学基金;

关键词：

ZnO; Vanadium; Piezoelectric; Surface acoustic wave; Filter; Diamond; Piezoresponse; THIN-FILMS; DIAMOND FILMS; ZNO FILMS; DEPOSITION; RESISTIVITY; QUALITY;

D O I：

10.1016/j.apsusc.2009.11.077

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

High-frequency surface acoustic wave (SAW) filters using undoped and V-doped ZnO films were fabricated on diamond. Compared with their counterparts, the SAW filters using V-doped ZnO films have higher electromechanical coupling coefficient of similar to 2.9% and lower insertion loss. The filtering performance improvement is considered to be due to the ferroelectricity in V-doped ZnO films and the resultant high piezoresponse (similar to 110 pm/V), which is one order of magnitude larger than that of undoped ZnO films. In addition, more perfect (0 0 2) preferred orientation, better uniform grains and smoother surface of V-doped ZnO films also contribute to the filtering performance improvement. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：3081 / 3085

页数：5

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