Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres:: in situ spectroscopy and plasma current dependence

被引：14
作者：
Joensson, M.
Nerushev, O. A.
Campbell, E. E. B. [1 ]
机构：
[1] Gothenburg Univ, Dept Phys, S-41296 Gothenburg, Sweden
[2] RAS SB, Inst Thermophys, Novosibirsk 63090, Russia
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2007年 / 88卷 / 02期
关键词：
Plasma Current; Vibrational Temperature; Multiwalled Nanotubes; Swan Band; Graphite Basal Plane;
D O I：
10.1007/s00339-007-3994-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Dc plasma-enhanced CVD growth of nanotubes and nanofibres is studied as a function of plasma power (3-40 W). The dependence of the nanotube/nanofibre morphology for growth on thin iron films and lithographically prepared individual nickel dots is investigated. In both cases, large differences in the morphology of the carbon nanostructures are observed as the plasma power is changed. In situ optical emission spectroscopy is used to obtain insight into the important parameters affecting the growth. The best growth results are found for intermediate plasma powers (15 W).
引用
收藏
页码：261 / 267
页数：7
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