ATR-FTIR and nanoindentation measurements of PMDA-ODA polyimide film under different curing temperature

被引:19
作者
Lee, Shih-Chin
Tai, Fong-Cheng [1 ]
Wei, Che-Hung
Yu, Jui-I
机构
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan
[2] TATUNG Univ, Dept Engn Mech, Taipei 104, Taiwan
[3] Natl Sun Yat Sen Univ, Inst Sci Mat, Kaohsiung 804, Taiwan
关键词
curing temperature; ATR-FTIR (Attenuated total reflectance-Fourier transform infrared spectrometer); micro-hardness; nanoelastic modulus; nano-hardness;
D O I
10.2320/matertrans.MER2007045
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
ATR-FTIR apparatus is used to measure the curing rate of PMDA-ODA polyimide film in order to avoid sinusoidal interference fringe. From the corrected height method, the curing rate is found to have positive correlative trend with the curing temperature. It was shown that the curing rate under 300 degrees C is 92.1% than that under 400 degrees C for one hour. The curing degree related to the mechanical properties was further demonstrated by nanoindentation. The results show that the higher the curing rate the higher the nano-hardness and nano-modulus due to the thermal imidization of polyimide characteristic. The nano-hardness ratio of curing degree at 300 degrees C over curing degree at 400 degrees C is 0.89, while the nano-modulus of which is 0.95.
引用
收藏
页码:1554 / 1557
页数:4
相关论文
共 28 条
  • [1] The effect of polyimide surface chemistry and morphology on critical stress intensity factor
    Amagai, M
    [J]. MICROELECTRONICS RELIABILITY, 2000, 40 (12) : 2077 - 2086
  • [2] The nanoindentation behaviour of hard and soft films on silicon substrates
    Beegan, D
    Chowdhury, S
    Laugier, MT
    [J]. THIN SOLID FILMS, 2004, 466 (1-2) : 167 - 174
  • [3] Interfacial-shear strength of the perfluorocyclobutane films on silicon
    Boddapati, Srinivasa Rao
    Ma, Hong
    Bordia, Rajendra K.
    Jen, Alex K-Y.
    [J]. JOURNAL OF MATERIALS RESEARCH, 2006, 21 (07) : 1759 - 1769
  • [4] Nanoindentation behaviour of layered silicate reinforced unsaturated polyester nanocomposites
    Dhakal, H. N.
    Zhang, Z. Y.
    Richardson, M. O. W.
    [J]. POLYMER TESTING, 2006, 25 (06) : 846 - 852
  • [5] Wafer level chip scale packaging (WL-CSP): An overview
    Garrou, P
    [J]. IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2000, 23 (02): : 198 - 205
  • [6] Polyethylene characterization by FTIR
    Gulmine, JV
    Janissek, PR
    Heise, HM
    Akcelrud, L
    [J]. POLYMER TESTING, 2002, 21 (05) : 557 - 563
  • [7] Determination of Young's modulus and yield stress of porous low-k materials by nanoindentation
    Herrmann, M.
    Schwarzer, N.
    Richter, F.
    Fruehauf, S.
    Schulz, S. E.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) : 4305 - 4310
  • [8] RAMP RATE EFFECT ON POLYIMIDE FILM PROPERTIES AND MORPHOLOGY
    JOU, JH
    LIN, CP
    SHEU, WH
    [J]. JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 1995, 33 (12) : 1803 - 1811
  • [9] FTIR spectroscopy and FTIR microscopy of vacuum-evaporated polyimide thin films
    Karamancheva, I
    Stefov, V
    Soptrajanov, B
    Danev, G
    Spasova, E
    Assa, J
    [J]. VIBRATIONAL SPECTROSCOPY, 1999, 19 (02) : 369 - 374
  • [10] Preparation, characterization, and photo-induced liquid crystal alignment of polyimide and poly(vinyl cinnamate) blend alignment layer
    Kim, HT
    Park, JK
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (1A): : 201 - 208