High sensitivity chlorine gas sensors using Cu-phthalocyanine thin films

被引：64

作者：

Miyata, T ^{[1
]}

Kawaguchi, S ^{[1
]}

Ishii, M ^{[1
]}

Minami, T ^{[1
]}

机构：

[1] Kanazawa Inst Technol, Optoelect Device Syst R&D Ctr, Nonoichi, Ishikawa 9218501, Japan

来源：

THIN SOLID FILMS | 2003年 / 425卷 / 1-2期

关键词：

Cu-phthalocyanine; thin films; gas sensor; chlorine gas; high sensitivity;

D O I：

10.1016/S0040-6090(02)01129-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High sensitivity chlorine (Cl-2) gas detection has been realized by newly developed gas sensors using Cu-phthalocyanine (CuPc) thin films. The CuPc thin film gas sensors exhibited an increase of conductivity with exposure to Cl-2 gas. The sensing properties of the CuPc thin film gas sensors were strongly dependent on the preparation conditions of CuPc thin films. The highest sensitivity for Cl-2 gas was obtained in the gas sensor using CuPc thin film prepared under the optimized preparation conditions: substrate temperature of 170 degreesC, evaporation temperature of 475 degreesC and film thickness of 50 nm. It was found that Cl, gas detection was realized at a minimum concentration of 0.18 ppm. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：255 / 259

页数：5

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