Femtosecond laser microfabrication of periodic structures using a microlens array

被引：131
作者：
Matsuo, S
Juodkazis, S
Misawa, H
机构：
[1] Univ Tokushima, Grad Sch Engn, Tokushima 7708506, Japan
[2] JST, CREST, Tokushima 7708506, Japan
[3] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, Sapporo, Hokkaido 0010021, Japan
[4] JST, CREST, Kita Ku, Sapporo, Hokkaido 0010021, Japan
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 80卷 / 04期
关键词：
D O I：
10.1007/s00339-004-3108-x
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.
引用
收藏
页码：683 / 685
页数：3
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