Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing

被引:19
作者
Park, Jungjae [1 ]
Kim, Seung-Woo [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea
基金
新加坡国家研究基金会;
关键词
10;
D O I
10.1364/OL.35.000019
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Optical interferometers for surface metrology require high immunity to vibration when they are to be used outside the laboratory environment. Here we describe a continuous phase-shifting method as a means of vibration suppression, which implements phase shifting uninterruptedly while capturing resulting interference fringes at a high rate. The continuous phase shifting allows the interference initial phase under measurement to be locked to a single temporal frequency in captured fringes, thereby being recovered free from vibration by Fourier-based postprocessing. This continuous phase-shifting method can be realized with any phase-shifting interferometers by incorporating a high-speed digital camera with good intensity-to-voltage conversion linearity. (C) 2009 Optical Society of America
引用
收藏
页码:19 / 21
页数:3
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