Hydrogen effects on crystallinity, photoluminescence, and magnetization of indium tin oxide thin films sputter-de posited on glass substrate without heat treatment

Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated X-ray diffraction due to polycrystalline ITO, blue-green photo-luminescence (PL) due to oxygen defects in nano-structured ITO crystals, and paramagnetic behavious in temperature dependence of magnetization overlapped with diamagnetic signal from the substrate, The carrier density n of the films was of the order of 10(20) cm(-3), and varied as an inverse of V character the hydrogen concentration [H] in the gas . The n value peaked at [H] = 1% spectral features at approximate to 430 and approximate to 470 nm of the pL emission were invariant with [H] . The order of the density of electron N with spins obeying the Curie law was 10 cm and the variation with [H] was almost parallel of that in n with [H] (C) WILEY-VCH Verlag GmbH & Co. KGaA, weinheim