Soft-Shear-Aligned Vertically Oriented Lamellar Block Copolymers for Template-Free Sub-10 nm Patterning and Hybrid Nanostructures

被引:14
作者
Singh, Maninderjeet [1 ]
Agrawal, Aman [1 ]
Wu, Wenjie [1 ]
Masud, Ali [1 ]
Armijo, Edward [1 ]
Gonzalez, Damian [1 ]
Zhou, Shenghui [2 ]
Terlier, Tanguy [3 ]
Zhu, Chenhui [4 ]
Strzalka, Joseph [5 ]
Matyjaszewski, Krzysztof [6 ]
Bockstaller, Michael [7 ]
Douglas, Jack F. [8 ]
Karim, Alamgir [1 ]
机构
[1] Univ Houston, Dept Chem & Biomol Engn, Houston, TX 77204 USA
[2] Univ Houston, Mat Sci Program, Houston, TX 77204 USA
[3] Rice Univ, SIMS Lab, Shared Equipment Author, Houston, TX 77005 USA
[4] Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA
[5] Argonne Natl Lab, Xray Sci Div, Lemont, IL 60439 USA
[6] Carnegie Mellon Univ, Dept Chem, Pittsburgh, PA 15213 USA
[7] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA
[8] NIST, Mat Sci & Engn Div, Gaithersburg, MD 20899 USA
基金
美国国家科学基金会;
关键词
block copolymers; template free alignment; sub-10 nm patterning; self-assembly; aligned nanowires; polymer-grafted nanoparticles; hybrid nanowire-nanoparticle structures; plasmonic resonance; SELF-ASSEMBLED STRUCTURES; FILMS; ORIENTATION; GRAPHOEPITAXY; SENSITIVITY; ALIGNMENT; DEVICES;
D O I
10.1021/acsami.1c23865
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The template-free unidirectional alignment of lamellar block copolymers (l-BCPs) for sub-10 nm high-resolution patterning and hybrid multicomponent nanostructures is important for technological applications. We demonstrate a modified soft-shear-directed self-assembly (SDSA) approach for aligning pristine l-BCPs and l-BCPs with incorporated polymer-grafted nanoparticles (PGNPs), as well as the l-BCP conversion to aligned gold nanowires, and hybrid of metallic gold nanowire and dielectric silica nanoparticle in the form of line-dot nanostructures. The smallest patterns have a half-pitch as small as 9.8 nm. In all cases, soft-shear is achieved using a high-molecular-mass polymer topcoat layer, with support on a neutral bottom layer. We also show that the hybrid line-dot nanostructures have a red-shifted plasmonic response in comparison to neat gold nanowires. These template-free aligned BCPs and nanowires have potential use in nanopatterning applications, and the line-dot nanostructures should be useful in the sensing of biomolecules and other molecular species based on the plasmonic response of the nanowires.
引用
收藏
页码:12824 / 12835
页数:12
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