Ceramic TiC/a:C protective nanocomposite coatings: Structure and composition versus mechanical properties and tribology

被引：36
作者：
Olah, Nikolett [1 ]
Fogarassy, Zsolt [1 ]
Sulyok, Attila [1 ]
Szivos, Janos [1 ]
Csanadi, Tamas [2 ]
Balazsi, Katalin [1 ]
机构：
[1] Hungarian Acad Sci, Energy Res Ctr, Inst Tech Phys & Mat Sci, Thin Film Phys Dept, Konkoly Thege M Str 29-33, H-1121 Budapest, Hungary
[2] Slovak Acad Sci, Inst Mat Res, Watsonova 47, Kosice 04001, Slovakia
来源：
CERAMICS INTERNATIONAL | 2016年 / 42卷 / 10期
关键词：
TiC/a:C thin film; TEM; Tribology; Mechanical properties; XPS; THIN-FILMS; CH COATINGS; ELASTIC-MODULUS; LOW-FRICTION; MICROSTRUCTURE; TIN; PERFORMANCE; INDENTATION; BEHAVIOR; HARDNESS;
D O I：
10.1016/j.ceramint.2016.04.164
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The relationship between the structure, elemental composition, mechanical and tribological properties of TiC/amorphous carbon (TiC/a:C) nanocomposite thin films was investigated. TiC/a:C thin film of different compositions were sputtered by DC magnetron sputtering at room temperature. In order to prepare the thin films with various morphology only the sputtering power of Ti source was modified besides constant power of C source. The elemental composition of the deposited films and structural investigations confirmed the inverse changes of the a:C and titanium carbide (TiC) phases. The thickness of the amorphous carbon matrix decreased from 10 nm to 1-2 nm simultaneously with the increasing Ti content from 6 at% to 47 at%. The highest hardness (H) of similar to 26 GPa and modulus of elasticity (E) of similar to 220 GPa with friction coefficient of 0.268 was observed in case of the film prepared at similar to 38 at% Ti content which consisted of 4-10 nm width TiC columns separated by 2-3 nm thin a:C layers. The H3/E2 ratio was similar to 0.4 GPa that predicts high resistance to plastic deformation of the TiC based nanocomposites beside excellent wear-resistant properties (H/E=0.12). (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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收藏
页码：12215 / 12220
页数：6
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