Correlation Between Electrical Performance and Gate Width of GaN-Based HEMTs

被引:22
作者
Sun, Yue [1 ]
Zhang, Haochen [1 ]
Yang, Lei [1 ]
Hu, Kunpeng [1 ]
Xing, Zhanyong [1 ]
Liang, Kun [1 ]
Yu, Huabin [1 ]
Fang, Shi [1 ]
Kang, Yang [1 ]
Wang, Danhao [1 ]
Xu, Guangwei [1 ]
Sun, Haiding [1 ]
Long, Shibing [1 ]
机构
[1] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Anhui, Peoples R China
基金
中国国家自然科学基金;
关键词
AlGaN/GaN HEMT; gate-width modulation; temperature-dependent characterizations; BREAKDOWN VOLTAGE; ALGAN/GAN HEMTS; LINEARITY; CONFIGURATION;
D O I
10.1109/LED.2022.3183293
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we comprehensively studied the correlation between the electrical characteristics and the gate width (W-G) of GaN-based HEMTs. On the one hand, as W-G is scaled down from 100 mu m down to 3 mu m, the devices exhibit five-times-enhanced on-state drain current density and largely reduced on-resistance, thanks to the increased electron mobility and mitigated self-heating effects in the narrow-W-G channels. On the other hand, the devices with a wider W-G exhibit reduced off-state leakage current and enhanced breakdown voltage, thanks to a decreased electric field and increased Schottky barrier height. Further temperature-dependent characterization reveals that the W-G-modulation behavior on both on- and off-state device properties is still effective at a high temperature of 150 degrees C. These experimental results can provide a straightforward approach for effective channel modulation and device optimization of GaN-based power devices of the future.
引用
收藏
页码:1199 / 1202
页数:4
相关论文
共 32 条
[1]   Excimer laser liftoff of AlGaN/GaN HEMTs on thick AlN heat spreaders [J].
Alam, Md Didarul ;
Gaevski, Mikhail ;
Jewel, Mohi Uddin ;
Mollah, Shahab ;
Mamun, Abdullah ;
Hussain, Kamal ;
Floyd, Richard ;
Simin, Grigory ;
Chandrashekhar, M. V. S. ;
Khan, Asif .
APPLIED PHYSICS LETTERS, 2021, 119 (13)
[2]   The 2018 GaN power electronics roadmap [J].
Amano, H. ;
Baines, Y. ;
Beam, E. ;
Borga, Matteo ;
Bouchet, T. ;
Chalker, Paul R. ;
Charles, M. ;
Chen, Kevin J. ;
Chowdhury, Nadim ;
Chu, Rongming ;
De Santi, Carlo ;
De Souza, Maria Merlyne ;
Decoutere, Stefaan ;
Di Cioccio, L. ;
Eckardt, Bernd ;
Egawa, Takashi ;
Fay, P. ;
Freedsman, Joseph J. ;
Guido, L. ;
Haeberlen, Oliver ;
Haynes, Geoff ;
Heckel, Thomas ;
Hemakumara, Dilini ;
Houston, Peter ;
Hu, Jie ;
Hua, Mengyuan ;
Huang, Qingyun ;
Huang, Alex ;
Jiang, Sheng ;
Kawai, H. ;
Kinzer, Dan ;
Kuball, Martin ;
Kumar, Ashwani ;
Lee, Kean Boon ;
Li, Xu ;
Marcon, Denis ;
Maerz, Martin ;
McCarthy, R. ;
Meneghesso, Gaudenzio ;
Meneghini, Matteo ;
Morvan, E. ;
Nakajima, A. ;
Narayanan, E. M. S. ;
Oliver, Stephen ;
Palacios, Tomas ;
Piedra, Daniel ;
Plissonnier, M. ;
Reddy, R. ;
Sun, Min ;
Thayne, Iain .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2018, 51 (16)
[3]   AlGaN polarization-doped field effect transistor with compositionally graded channel from Al0.6Ga0.4N to AIN [J].
Armstrong, Andrew M. ;
Klein, Brianna A. ;
Baca, Albert G. ;
Allerman, Andrew A. ;
Douglas, Erica A. ;
Colon, Albert ;
Abate, Vincent M. ;
Fortune, Torben R. .
APPLIED PHYSICS LETTERS, 2019, 114 (05)
[4]   GaN-on-Si Power Technology: Devices and Applications [J].
Chen, Kevin J. ;
Haeberlen, Oliver ;
Lidow, Alex ;
Tsai, Chun Lin ;
Ueda, Tetsuzo ;
Uemoto, Yasuhiro ;
Wu, Yifeng .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (03) :779-795
[5]   High Breakdown Voltage in RF AlN/GaN/AlN Quantum Well HEMTs [J].
Hickman, Austin ;
Chaudhuri, Reet ;
Bader, Samuel James ;
Nomoto, Kazuki ;
Lee, Kevin ;
Xing, Huili Grace ;
Jena, Debdeep .
IEEE ELECTRON DEVICE LETTERS, 2019, 40 (08) :1293-1296
[6]   Ultraviolet optoelectronic devices based on AlGaN-SiC platform: Towards monolithic photonics integration system [J].
Huang, Chen ;
Zhang, Haochen ;
Sun, Haiding .
NANO ENERGY, 2020, 77
[7]   Schottky barrier inhomogeneity in (Pd / Au) Al0.22 Ga0.78N/ GaN/SiC HEMT: Triple Gaussian distributions [J].
Jabbari, I ;
Baira, M. ;
Maaref, H. ;
Mghaieth, R. .
CHINESE JOURNAL OF PHYSICS, 2021, 73 :719-731
[8]   Polarization engineering via InAlN/AlGaN heterostructures for demonstration of normally-off AlGaN channel field effect transistors [J].
Li, Lei ;
Yamaguchi, Ryohei ;
Wakejima, Akio .
APPLIED PHYSICS LETTERS, 2020, 117 (15)
[9]   Impact of Fin Width on Tri-Gate GaN MOSHEMTs [J].
Ma, Jun ;
Santoruvo, Giovanni ;
Nela, Luca ;
Wang, Taifang ;
Matioli, Elison .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (09) :4068-4074
[10]   Tri-gate GaN junction HEMT [J].
Ma, Yunwei ;
Xiao, Ming ;
Du, Zhonghao ;
Yan, Xiaodong ;
Cheng, Kai ;
Clavel, Michael ;
Hudait, Mantu K. ;
Kravchenko, Ivan ;
Wang, Han ;
Zhang, Yuhao .
APPLIED PHYSICS LETTERS, 2020, 117 (14)