Beam shaping and probe characterization in the scanning electron microscope

被引：8

作者：

Rihacek, T. ^{[1
]}

Horak, M. ^{[2
]}

Schachinger, T. ^{[3
,4
]}

Mika, F. ^{[1
]}

Matejka, M. ^{[1
]}

Kratky, S. ^{[1
]}

Fort, T. ^{[1
]}

Radlicka, T. ^{[1
]}

Johnson, C. W. ^{[6
]}

Novak, L. ^{[5
]}

Sed'a, B. ^{[5
]}

McMorran, B. J. ^{[6
]}

Mullerova, I. ^{[1
]}

机构：

[1] Czech Acad Sci, Inst Sci Instruments, Kralovopolska 147, Brno 61264, Czech Republic

[2] Brno Univ Technol, Cent European Inst Technol, Purkynova 123, Brno 61200, Czech Republic

[3] TU Wien, USTEM, Wiedner Hauptstr 8-10, A-1040 Vienna, Austria

[4] TU Wien, Inst Solid State Phys, Wiedner Hauptstr 8-10, A-1040 Vienna, Austria

[5] Thermo Fisher Sci Brno, Vlastimila Pecha 12, Brno 62700, Czech Republic

[6] Univ Oregon, Dept Phys, Eugene, OR 97405 USA

来源：

ULTRAMICROSCOPY | 2021年 / 225卷

基金：

奥地利科学基金会;

关键词：

Electron diffraction; SEM; Electron beam structuring; Spot shape measurement; Electron vortex beam; VORTEX BEAMS; GENERATION; DIAMETER; PROFILE; SIZE; SEM; PROPAGATION; DIFFRACTION; ABERRATIONS; ASTIGMATISM;

D O I：

10.1016/j.ultramic.2021.113268

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

引用

页数：9

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