Prospects for active matrix displays on plastic

被引：18

作者：

Gates, SM ^{[1
]}

机构：

[1] IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA

来源：

AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY - 1997 | 1997年 / 467卷

关键词：

D O I：

10.1557/PROC-467-843

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We review the status of active matrix display fabrication on plastic substrates, specifically active matrix liquid crystal displays (AM LCDs). Research efforts in the U.S. and Europe are surveyed. Currently available transparent plastics, and active programs to improve these materials are described. Our work on thin film transistor (TFT) fabrication at 125 degrees C is then reported, with a comparison of reactive sputtering and plasma enhanced CVD methods.

引用

页码：843 / 849

页数：7