Design and fabrication of an electrochemical chip for liquid-phase transmission electron microscopy

被引：6

作者：

Sasaki, Yuki ^{[1
]}

Mizushima, Ayako ^{[2
]}

Mita, Yoshio ^{[2
]}

Yoshida, Kaname ^{[1
]}

Kuwabara, Akihide ^{[1
]}

Ikuhara, Yuichi ^{[1
,3
]}

机构：

[1] Japan Fine Ceram Ctr, Nanostruct Res Lab, Atsuta Ku, 2-4-1 Mutsuno, Nagoya, Aichi 4568587, Japan

[2] Univ Tokyo, Sch Engn, Dept Elect Engn & Informat Syst, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[3] Univ Tokyo, Sch Engn, Inst Engn Innovat, Bunkyo Ku, 2-11-16 Yayoi, Tokyo 1138656, Japan

来源：

MICROSCOPY | 2022年 / 71卷 / 04期

关键词：

MEMS; in situ; LP-TEM; electrochemical deposition; Zn; fabrication; GROWTH; LITHIUM;

D O I：

10.1093/jmicro/dfac023

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Liquid-phase transmission electron microscopy (LP-TEM) can be used with an electrochemical chip (e-chip) to observe electrochemical reactions in a liquid in situ. The design of electrodes on an e-chip fabricated using microelectromechanical system technology cannot be easily changed. Here, we report a newly designed e-chip and its fabrication process. Electrodes with a desired shape were fabricated with various metals via an additional step of vacuum deposition onto our e-chip with a shadow mask. For precise control of the electrochemical reactions in LP-TEM, optimization of the electrode shape and material is critical.

引用

页码：238 / 241

页数：4

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