Fiber tips for scanning near-field optical microscopy fabricated by normal and reverse etching

被引：53

作者：

Sayah, A ^{[1
]}

Philipona, C ^{[1
]}

Lambelet, P ^{[1
]}

Pfeffer, M ^{[1
]}

Marquis-Weible, F ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Opt Appl, CH-1015 Lausanne, Switzerland

来源：

ULTRAMICROSCOPY | 1998年 / 71卷 / 1-4期

关键词：

D O I：

10.1016/S0304-3991(97)00106-X

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Optical fiber tips: used as probes for scanning near-held optical microscopy, are produced by chemical etching in fluorohydric acid, followed by vacuum deposition of an aluminium coating. Fabrication technique is presented for two different configurations. The effects of several etching parameters on the tip quality are discussed: acid concentration, solvent type, etching temperature, and etching speed are considered. In particular, a solution is proposed to obtain tips with large cone angles, resulting in optical transmission as high as 10(-3) measured through a metallized tip. (C) 1998 Published by Elsevier Science B.V. All rights reserved.

引用

页码：59 / 63

页数：5

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