Effect of roughness on adhesion of polymeric coatings used for microgrippers

被引：17

作者：

Balabanava, N. ^{[1
]}

Wierzbicki, R.

Zielecka, M.

Rymuza, Z.

机构：

[1] Warsaw Univ Technol, Inst Micromech & Photon, PL-02525 Warsaw, Poland

[2] Nascatec GmbH, D-34131 Kassel, Germany

[3] Inst Ind Chem, PL-01793 Warsaw, Poland

来源：

MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期

关键词：

adhesion; microgripper; roughness; polymer coatings;

D O I：

10.1016/j.mee.2007.01.183

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The purpose of the work was to examine the influence of topography and materials parameters on the value of pull-off force (adhesion) with future application of obtained results to solve the adhesion problem in microhandling. The research consists of two parts: theoretical and experimental. In theoretical research the model of contact, which takes into account the roughness of the contacted bodies is presented. In experimental part polymeric films with low surface energy were investigated as a solution to decrease adhesion at the gripping surface of the micromanipulator. To introduce surface roughness into the solution of polymers the nanoball structures (nanoparticles) were mixed. In result of these modifications three polymer samples were made: with density of nanoballs in the volume 2%, 5% and 10%. In result of these studies the dependences concerning the influence of the roughness on the adhesion were obtained. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：1227 / 1230

页数：4