A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

被引：49

作者：

Hong, Jianxun ^{[1
,3
]}

Spring, Andrew M. ^{[2
]}

Qiu, Feng ^{[1
]}

Yokoyama, Shiyoshi ^{[1
,2
]}

机构：

[1] Kyushu Univ, Inst Mat Chem & Engn, 6-1 Kasuga Koen, Kasuga, Fukuoka 8168580, Japan

[2] Kyushu Univ, Dept Mol & Mat Sci, 6-1 Kasuga Koen, Kasuga, Fukuoka 8168580, Japan

[3] Wuhan Univ Technol, Sch Informat Engn, Wuhan 430070, Hubei, Peoples R China

来源：

SCIENTIFIC REPORTS | 2019年 / 9卷 / 1期

关键词：

WIDE BANDWIDTH; FABRICATION; DESIGN;

D O I：

10.1038/s41598-019-49324-5

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was -3.5 dB which corresponds to a peak coupling efficiency of -1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.

引用

页数：8

共 29 条

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