A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

被引：49
作者：
Hong, Jianxun [1 ,3 ]
Spring, Andrew M. [2 ]
Qiu, Feng [1 ]
Yokoyama, Shiyoshi [1 ,2 ]
机构：
[1] Kyushu Univ, Inst Mat Chem & Engn, 6-1 Kasuga Koen, Kasuga, Fukuoka 8168580, Japan
[2] Kyushu Univ, Dept Mol & Mat Sci, 6-1 Kasuga Koen, Kasuga, Fukuoka 8168580, Japan
[3] Wuhan Univ Technol, Sch Informat Engn, Wuhan 430070, Hubei, Peoples R China
来源：
SCIENTIFIC REPORTS | 2019年 / 9卷 / 1期
关键词：
WIDE BANDWIDTH; FABRICATION; DESIGN;
D O I：
10.1038/s41598-019-49324-5
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was -3.5 dB which corresponds to a peak coupling efficiency of -1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.
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页数：8
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