Ionization vacuum gauge with a carbon nanotube field electron emitter combined with a shield electrode

被引：20

作者：

Liu, Huarong ^{[1
,2
]}

Nakahara, Hitoshi ^{[1
]}

Uemura, Sashiro ^{[3
]}

Saito, Yahachi ^{[1
]}

机构：

[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, VBL, Nagoya, Aichi 4648603, Japan

[3] Noritake Co Ltd, Nagoya, Aichi, Japan

来源：

VACUUM | 2009年 / 84卷 / 05期

关键词：

Nanotube; Cold cathode; Field emission; Vacuum ionization gauge; EMISSION;

D O I：

10.1016/j.vacuum.2009.06.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The applicability of carbon nanotubes to an electron source for a Bayard-Alpert type vacuum gauge has been investigated. Three gauge configurations are designed to optimize the gauge performance. The optimized gauge, in which an additional shield electrode is fixed on a gate electrode, exhibits good measurement of linearity between ion Current and system pressure from 10(-7) to 10(-2) Pa. A gauge sensitivity of 0.05 Pa-1 has been achieved under 100 mu A emission current for nitrogen, comparable with 0.07 Pa-1 of commercial ionization gauges. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：713 / 717

页数：5

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