MEMS mass spectrometers: the next wave of miniaturization

被引：45
作者：
Syms, Richard R. A. [1 ]
Wright, Steven [2 ]
机构：
[1] Univ London Imperial Coll Sci Technol & Med, EEE Dept, Exhibit Rd, London SW7 1AZ, England
[2] Microsa Syst, GMS House,Boundary Rd, Woking GU21 5BX, Surrey, England
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2016年 / 26卷 / 02期
关键词：
mass spectrometer; mass filter; MEMS; CYLINDRICAL ION-TRAP; PORTABLE GAS-CHROMATOGRAPH; DESORPTION ELECTROSPRAY-IONIZATION; CHEMICAL WARFARE AGENTS; TOTAL ANALYSIS SYSTEMS; CAPILLARY-ELECTROPHORESIS; LIQUID-CHROMATOGRAPHY; MAGNETIC-SECTOR; HIGH-RESOLUTION; LOW-COST;
D O I：
10.1088/0960-1317/26/2/023001
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.
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页数：28
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